Our Subsidiaries

Established in April 2009, Shanghai Kingstone Semiconductor Co., Ltd. is a leading provider of advanced IC equipment. Acquired by Shanghai Vital Deeptech Co., Ltd. (SH.600641) in 2018, Kingstone is dedicated to the development of ion implantation technology.Headquartered in Pudong New Area, Shanghai, c has established subsidiaries in Beijing, Hefei, and Shanghai Lingang.Its product portfolio includes low-energy high-current ion implanters and high-energy ion implanters. Its systems serve a wide range of applications—from logic and memory to power devices—with process technology certified for mass production at process nodes down to 28nm. Kingstone is a leader in commercializing domestic high-end ion implantation technology and has secured multiple repeat orders from several major customers since 2020.
Kingstone currently has over 250 employees, with R&D personnel accounting for more than 60%.It focuses on R&D and innovation of integrated circuit ion implanters. It has developed a series of core technologies with independent intellectual property rights and has secured over 139 authorized patents.It has undertaken multiple government-backed science and technology programs, and has been granted multiple honors and awards, including the Second Prize of Shanghai Science and Technology Award, the First Prize of Beijing Science and Technology Progress Award, Shanghai's Specialized, Refined, Differential, and Innovative SME, and Shanghai's Technology Innovation "Little Giant" Enterprise.Committed to becoming a world-leading provider of ion implantation equipment and services, it strives to deliver high-performance, high-throughput, reliable, and cost-effective equipment for China’s semiconductor industry.